Computational Lithography

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This is the first book to address the optimization of resolution enhancement techniques in optical lithography. It provides an in-depth discussion of RET tools that use model-based...

  • Publisher: John Wiley & Sons
  • Author: Xu Ma
  • ISBN-13: 9780470596975

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Computational Lithography
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  • ISBN-13:
    • 9780470596975
  • ISBN:
    • 047059697X
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  • Publisher
    John Wiley & Sons
  • Author
    Xu Ma
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